Process Development of Spin-on Doping and ARC for Crystalline-Si Solar Cells
碩士 === 國立雲林科技大學 === 電子與光電工程研究所碩士班 === 100 === Solar cell is made by Spin-on called Dopants / Rapid Thermal Annealing diffusion technology. Phosphorus atoms into the single-crystal silicon and formation of n+-p junction by the phosphorus solution (P509) spin on wafer and diffusion temperature of 850...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/11784245605745991025 |