The study of optical properties of patterned sapphire substrate

• Main Authors: Chia-Yu Kao, 高嘉佑
• Other Authors: 柯文政
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/38939320215298919055

碩士 === 元智大學 === 先進能源碩士學位學程 === 100 === The optical properties of a series of varying pattern size of the patterned sapphire substrate (PSS) were studied by spectrometer. The pattern size and morphology of PSS was measured by the scanning electron microscopy (SEM), atomic force microscopy (AFM). According to the surface morphology measurement, two kinds of morphology namely circle-pyramid and triangle-pyramid were defined in these samples. The diameter of PSS ranging from 1.2 μm to 3.5μm, depth ranging from 1.0 μm to 1.8μm, spacing ranging of 0.4 μm to 1.0 μm were measured. We also finished the optical properties measurement of PSS including total transmittance rate (TT%), diffuse transmittance rate (DT%), total reflection rate (TR%) and diffuse reflection rate (DR%) for these samples. Comparing with the surface morphology and optical properties of PSS samples, we find that a high DT% can be achieved on the small diameter, small spacing and deep depth of PSS sample. In addition, we analysis the relationship between the optical properties of PSS and LEDs power, indicated that the increase LED power with increasing of DT% of PSS. It was mean that the high power LED can be fabricated on the high DT% of PSS.