The Implementation of Air Floating System for Glass Substrate
碩士 === 元智大學 === 機械工程學系 === 100 === This study is to design an air-floating table system possessing a well stability and vibration resistance. A new structure has been proposed that a designed conduit combines the restrictor and air pocket. The flow resistance will be changed according to the float...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/94862995945011761184 |