Study of Phosphorus Deactivation in Silicon
博士 === 長庚大學 === 電子工程學系 === 101 === In this study, experiments and modeling were performed to investigate the phosphorus deactivation. Silicon-on-insulator wafers were used to obtain uniform doping profiles of phosphorus. Phosphorus activation was improved by the combination of preamorphization and e...
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| Format: | Others |
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2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45820650728145588357 |