Case study of engineering control of workplace hazards for an etching process of semiconductor manufacture
碩士 === 中國醫藥大學 === 職業安全與衛生學系碩士在職專班 === 101 === Because of the continuous evolution of the semiconductor manufacturing process, chemicals, processes and equipment were continue renewed, and that create some hazards, such as, creating of stench after process change. In this study, the actual cases of s...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85mvgn |