Characteristics of FZO/Si Heterojunction Solar Cells by RF Magnetron Sputtering
碩士 === 正修科技大學 === 電子工程研究所 === 101 === In this study, fluorine doped zinc oxide (FZO) films have been prepared by RF reactive magnetron sputtering on glass and p-Si substrates. The effects of substrate temperature (from RT to 300°C) on optical and electrical properties of FZO thin films were first st...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95703694872102293976 |