The growth of ZnO thin films and the application study of thepiezoelectric transducers
碩士 === 中原大學 === 電子工程研究所 === 101 === In this thesis, the zinc oxide (ZnO) films were deposited on ITO/PET substrate at room temperature by a magnetron reactive sputtering system. The effects of oxygen ratio on the structure of ZnO films were studied. X-ray diffraction (XRD) and Field-Emission Scannin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22165245798517260026 |