Small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry
碩士 === 健行科技大學 === 電子工程所 === 101 === In this thesis, a small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry is proposed. The basic sensing unit is composed of a prism assembly and a displacement probe. The prism assembly consists of a half wave (λ/2...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77832570133199749761 |