Lattice Constant of Sr-doped Lanthanum Titanate Thin Films with Various Oxygen Contents
碩士 === 大葉大學 === 電機工程學系 === 101 === In this study, Sr-doped LaTiO3(Sr0.16La0.84TiO3+δ) thin films on SrTiO3(001) were fabricated by the RF magnetron sputtering system. The deposited Sr-doped lanthanum titanate films were annealed under different oxygen pressure (10-4 torr, 6*10-5 torr, 4*10-5 torr, a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91999053013341634183 |