Study of Photoluminescence Spectra of the Low-Temperature Growth ZnO Thin Films
碩士 === 大葉大學 === 電機工程學系 === 101 === The epitaxial growth ZnO films were deposited on Si substrates by rf magnetron sputtering with substrate temperature below 300 ℃. The growth of thin films was performed at a pressure of 40 mtorr Ar and O2 with a sputtering power of 100 W. The deposited samples were...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2013
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Online Access: | http://ndltd.ncl.edu.tw/handle/95138086554655888623 |