A novel vacuum plasma surface modification process for nanoporous dielectric layers
碩士 === 逢甲大學 === 材料科學與工程學系 === 101
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96944172625689187277 |