Multiple surface modification of tantalum-based barrier layer for seeding and electroless copper plating

碩士 === 逢甲大學 === 材料科學與工程學系 === 101

Bibliographic Details
Main Author: 莊育承
Other Authors: 陳錦山
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/13565267425021418030