Hydrogenated microcrystalline silicon thin film fabricated with various ion current by ion-assisted deposition of RF magnetron sputtering
碩士 === 輔仁大學 === 物理學系碩士班 === 101 === Silicon thin film of solar cell is usually fabricated by plasma-enhance chemical vapor deposition (PECVD). The PECVD process is a high facility cost. And, the toxic gases, such as silane (SiH4), must be used in the fabrication process. The silicon film is also abl...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41833016015318292214 |