The properties of AZO/Metal/AZO transparent conductive films grown at room temperature by sputtering and post-treated in hydrogen plasma
碩士 === 崑山科技大學 === 光電工程研究所 === 101 === In this study, single AZO films and AZO/Metal/AZO tri-layer films as a transparent conductive film were grown on glass and plastic substrates where the interlayer was selected various metals such as Cu, Cr:Cu and Mo. The film properties of conductivity, transmi...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2013
|
Online Access: | http://ndltd.ncl.edu.tw/handle/68308635664049275958 |