The properties of AZO/Metal/AZO transparent conductive films grown at room temperature by sputtering and post-treated in hydrogen plasma

碩士 === 崑山科技大學 === 光電工程研究所 === 101 === In this study, single AZO films and AZO/Metal/AZO tri-layer films as a transparent conductive film were grown on glass and plastic substrates where the interlayer was selected various metals such as Cu, Cr:Cu and Mo. The film properties of conductivity, transmi...

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Bibliographic Details
Main Authors: Fu-Chun Tsai, 蔡福峻
Other Authors: Wen-Chang Huang
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/68308635664049275958