The optoelectronic properties of amorphous IGZO films deposited by co-sputtering and treated by atmosphere plasma and vacuum annealing
碩士 === 崑山科技大學 === 電機工程研究所 === 101 === In this study, we used RF magnetron co-sputtering to grow IGZO films on glass substrates. The films were processed by changing work pressure, process time, and RF power to get appropriate properties of films. After deposition, the IGZO samples were treated in va...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79008638265423060497 |