A Study of Polishing Pad for Bare Glass of TFT-LCD Applications
碩士 === 國立高雄應用科技大學 === 化學工程系碩士班 === 101 === With the flat plane display(FPD) of a wide range of application, short and light glass become a key technology, and the thinner the glass, chemical mechanical polishing(CMP) is more important. In order to increase the removal rate of the glass, often ad...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32148079518250545031 |