The Effect of AlN Layer on the Electrical Properties of Ni-Cr-Si-Al Thin Film by DC Magnetron Sputtering
碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 101 === In this study, aluminum nitride and nickel-chromium-silicon- aluminum thin films are prepared using DC magnetron sputtering deposition, respectively. To obtain different compositions of AlN thin film, the sputtering conditions are adjusted such as sputter...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89392747959657533480 |