Development of a New MEMS Transmission System Integrated with Micro Reluctance Motor and Planar Four-Bar Linkage
碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 101 === The purpose of this research proposes an innovative micro-plane transmission mechanism with multi-material processes. In production process we use laminated aluminum film to replace anti-reflective layer, sputtering copper and electroformed copper, signif...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18876751151844810448 |