Trend of Subthreshold Swing for 28nm HK/MG MOSFETs with DPN Process

碩士 === 明新科技大學 === 電子工程研究所 === 101 === Following the promotion of semiconductor process and the requirements of the electronic products, continuously shrinking field-effect transistors (FET), some worldwide semiconductor companies at 90-nm process tried to change the structures of FETs, such as strai...

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Bibliographic Details
Main Authors: Chong-Kuan Du, 杜重寬
Other Authors: Tsao-Yeh Chen
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/15374142112431054721