Fabrication and Characteristics Analysis of Transparent Thin-Film Transistors with Oxide Semiconductors Prepared by using Magnetron Co-sputtering Method
碩士 === 明新科技大學 === 電子工程研究所 === 101 === This study investigates effects of varying the processing parameters on the electrical and optical properties of IAZO (In2O3:Al2O3:ZnO) or IGZO (In2O3:Ga2O3:ZnO) films deposited on glass substrates. Semiconductor films were prepared by sputtering three targets...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85093138161459100925 |