Genetic Algorithm Approaches to Dispatch Rule for Wet Clean Station in Wafer Foundry
碩士 === 明志科技大學 === 工業工程與管理研究所 === 101 === This paper studies the scheduling problem in the wet cleaning station (a part of the diffusion process) in a wafer foundry. The wet cleaning station operates in batch of 50 wafers, the cleaning process consists of various sinks between stations and is a Jumpi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25998607916557405013 |