Study of properties of ZnO:Ga thin films prepared by RF magnetron sputtering on different substrates for amorphous silicon thin film solar cells
碩士 === 國立中興大學 === 光電工程研究所 === 101 === In this study, Gallium-doped zinc oxide (GZO) thin films were deposited on Polyimide、polyethylene terephthalate and glass substrate by RF magnetron sputtering. We investigated the effects of deposition parameters such as different substrate and SiNx buffer l...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26987987804594972792 |