Study on the Effect of Photolithography Process Parameters in the Half-Tone Mask for Thin Film Transistors
碩士 === 國立中興大學 === 光電工程研究所 === 101 === In general, most of five-mask process production are the thin-film transistor liquid crystal display industry including gate electrode, semiconductor layer, source, drain electrodes, and protective layer as well as the pixel electrode. The main topic of this...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07588120540375015543 |