Study of ultrasonic assisted cutting for PZT thin film machining.
碩士 === 國立中興大學 === 機械工程學系所 === 101 === The PZT thin film draws much more attention in developing the MEMS device. However, the efficiency of pattern generation by etching process limits its range of applications. To improve the flexibility and efficiency in the manufacturing of PZT thin film based...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03076480419497222273 |