Fabrication of a constant-force bistable micromechanism by electroforming
碩士 === 國立中興大學 === 精密工程學系所 === 101 === Fabrication of a constant-force bistable micromechanism by electroforming is studied in this thesis. Glass substrate is used in the process. A titanium layer is sputtered as the conductive layer, copper layer is used as a sacrificial layer and nickel is selected...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68328566570910967888 |