The Prevention Management of Airborne Molecular Contaminants in Clean Room
碩士 === 國立成功大學 === 工學院工程管理碩士在職專班 === 101 === The high-tech process in semiconductor manufacturing is rapidly progressing in recent years. According to the current capability of the manufacturing process being proceeded to the nanometer scale level, the airborne molecular contaminants hence has critic...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64694823712241662847 |