Controlling the Densities of Gallium Nitride Nanorods by Plasma Enhanced Chemical Vapor Deposition
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 101 === GaN is an excellent semiconductor material for the application due to its nature property. We combine the advantages of GaN and nano rod structure and present a self-developed PEVCD system for the GaN nano rod growth. To avoid merging of nano rods which leads...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03010757573931805583 |