Investigation of MEMS-Based Micro Atomizers for Fluorescent Particle Preparation
碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 101 === The study applies MEMS-based micro atomizer to manufacture micro fluorescent particles for Particle Image Velocimetry（PIV）application. In this thesis, micro atomizer is fabricated by using anodic bonding of Si wafer and pyrex glass 7740. Micro atomizers a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90660137443175006411 |