Application of the MgZnO-based metal-semiconductor-metal ultraviolet photodetector grown by Atomic Layer Deposition
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 101 === In this study, the ZnO thin film which has high quality and uniformity was grown at low temperature by atomic layer deposition system. The diethylzinc, Bis(cyclopentadienyl) magnesium and water were used as precursors, and then varied the pulse time of prec...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82717388868722025294 |