Investigation of ZITO Thin Film Transistor and It’s Optoelectronic Application
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 101 === In present study, it is the discussion of zinc oxide based thin film by sputtering. By adjusting the oxygen partial pressure or the sputtering power, the multifunctional thin films will be obtained. In the zinc indium tin oxide films prepared experiments, i...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68053784552432621176 |