Fabrication of Nickel Oxide (NiO) Based Chemical Sensors
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 101 === In this study, the nickel oxide thin films were fabricated by radio frequency (RF) magnetron sputtering technology to be applied in the ion sensing electrode. Also, the thin film structure is connected with metal-oxide-semiconductor field-effect transistors...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41520768032320579334 |