Fabrication of Gas Sensor with Nano-Sphere Structures
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 101 === In this work, we present a series of AlGaN-based Schottky diode hydrogen-sensing devices. The nanospheres (nanoparticles) are used to make different nanostructure on the surface of sensing area. The key point is that the nanoscale (〈 100 nm) material provid...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90452349255515007504 |