Study of III-V Nitride and ZnO Based Gas Sensors
博士 === 國立成功大學 === 微電子工程研究所碩博士班 === 101 === In this dissertation, a series of high-performance compound semiconductor based hydrogen sensors, including Schottky diodes, heterostructure field-effect transistors, and resistors, are fabricated and studied. Pd and Pt are used as sensing metals due to the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25631813942058261635 |