Sol–Gel Derived MgNb2O6 Thin Films for Transparent Microelectronic Applications
碩士 === 國立成功大學 === 電機工程學系碩博士班 === 101 === In this study, to produce a metal - insulator - metal (MIM) structure of the planar capacitor, the sol-gel method was used for coating MgNb2O6 thin film on the indium tin oxide (ITO) coated substrates and aluminum metal top electrode coated by electron beam e...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93000069362070934335 |