Mechanical and Tribological Properties of W-N/Ti-N Multilayer Films with Different Bilayer Period and Bias Voltage
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 101 === This study used the closed unbalanced magnetron sputtering system, configured a tungsten target and titanium targets, and induced nitrogen, to deposite W-N/Ti-N multilayers, Ti-N layers and a W-N layer. And designed a serie of experiments to analyze the cryst...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25579124870108960090 |