A study on fabrication, microstructure and photoluminescence properties of SRN and metal doped SRN thin films
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 101 === In this study, silicon-rich nitride (SRN) thin films were deposited on the Si(100) substrates and anodic aluminum oxide (AAO) templates by radio frequency reactive magnetron sputtering. We investigated different annealing process, annealing temperature and me...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/37937147699334748330 |