Fabrication of Semiconductor Nanowire Devices using Nano-Crack Lithography
碩士 === 國立成功大學 === 光電科學與工程學系 === 101 === In this dissertation, one-dimensional nanowire fabrication using Nano-crack lithography has been demonstrated. Nano-crack lithography is a self-assembly method which utilizes the thermal crack induced by immersing the bowtie-photoresist patterns into liquid n...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64278356968923208493 |