GaN-Base Opto-Electrical Devices With Sputtering AlN Buffer Layer
碩士 === 國立成功大學 === 光電科學與工程學系 === 101 === In this research,we investigated how to use magnetron sputtering system to grow AlN on patterned sapphire substrates and discussing it's optical and electrical characteristics.We hope to find out the most ideal sputtering power and the proper film thickne...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24513425744969105981 |