Investigated the Performance of VOx Microbolometers
碩士 === 國立成功大學 === 光電科學與工程學系 === 101 === In this thesis, the performance of the vanadium oxide (VOx) floating-type microbolometers was investigated. The VOx thin films were deposited using magnetron radio frequency (RF) sputtering system with various deposition conditions as the sensing layer of the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82150879128764029765 |