Automatic Data Quality Evaluation for the AVM System
博士 === 國立成功大學 === 製造資訊與系統研究所碩博士班 === 101 === This dissertation proposes the schemes of automatic process and metrology data-quality evaluations for the automatic virtual metrology (AVM) system. Firstly, principal component analysis (PCA) is applied to extract data features of all the collected equ...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60647806691221415464 |