Intelligent Parameter Screening Scheme for the AVM System
碩士 === 國立成功大學 === 製造資訊與系統研究所碩博士班 === 101 === In the past, our research team had developed the Automatic Virtual Metrology (AVM) System. This system is able to improve process capabilities and to enhance yield rates while monitoring qualities of all production pieces when implemented real-time online...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80964016859726613540 |