Intelligent Sampling Decision Scheme for the AVM System
碩士 === 國立成功大學 === 製造資訊與系統研究所碩博士班 === 101 === Wafer measurement plays a significant role in monitoring the quality of wafer manufacturing. To do real metrology, it requires measuring tools and additional cycle time; hence, it is a costly and time-consuming operation. Therefore, reducing sampling ra...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/28023378687289464414 |