Intelligent Sampling Decision Scheme for the AVM System
碩士 === 國立成功大學 === 製造資訊與系統研究所碩博士班 === 101 === Wafer measurement plays a significant role in monitoring the quality of wafer manufacturing. To do real metrology, it requires measuring tools and additional cycle time; hence, it is a costly and time-consuming operation. Therefore, reducing sampling ra...
Main Authors: | Chu-ChiehWu, 吳竺潔 |
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Other Authors: | Fan-Tien Cheng |
Format: | Others |
Language: | zh-TW |
Published: |
2013
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Online Access: | http://ndltd.ncl.edu.tw/handle/28023378687289464414 |
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