Study on Zinc Oxide Thin-Film Transistors Fabricated by Atomic Layer Deposition
碩士 === 國立暨南國際大學 === 電機工程學系 === 102 === In this thesis, the ZnO TFTs with finlike channels were fabricated by atomic layer deposition and nanoimprint technology. The electrical and material characterizations of ZnO thin film fabricated by plasma-assisted atomic layer deposition in low temperature...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45215087851070352038 |