The Study of SAMs/SiO2 Stacked Sensing Membrane for ISFETs
碩士 === 國立暨南國際大學 === 電機工程學系 === 101 === In this thesis, the SAM/SiO2 stacked sensing membrane was used to improve the sensing characteristic of ISFETs. In our results, the sensitivity, hysteresis and drift of EIS with the SAM/SiO2 stacked sensing membrane were all improved. Besides, the sensitivity o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45925080917437867195 |