The Study of SAMs/SiO2 Stacked Sensing Membrane for ISFETs

The Study of SAMs/SiO2 Stacked Sensing Membrane for ISFETs

碩士 === 國立暨南國際大學 === 電機工程學系 === 101 === In this thesis, the SAM/SiO2 stacked sensing membrane was used to improve the sensing characteristic of ISFETs. In our results, the sensitivity, hysteresis and drift of EIS with the SAM/SiO2 stacked sensing membrane were all improved. Besides, the sensitivity o...

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Main Authors: Tzu-Nien Lee, 李子念
Other Authors: Jiann-Heng Chen
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/45925080917437867195
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spelling ndltd-TW-101NCNU04420262015-10-13T22:24:09Z http://ndltd.ncl.edu.tw/handle/45925080917437867195 The Study of SAMs/SiO2 Stacked Sensing Membrane for ISFETs 應用於離子感應場效電晶體之自主裝單分子層/氧化層堆疊感測薄膜研究 Tzu-Nien Lee 李子念 碩士 國立暨南國際大學 電機工程學系 101 In this thesis, the SAM/SiO2 stacked sensing membrane was used to improve the sensing characteristic of ISFETs. In our results, the sensitivity, hysteresis and drift of EIS with the SAM/SiO2 stacked sensing membrane were all improved. Besides, the sensitivity of ISFETs was also improved .This technology will be suitable for the future high sensitivity ISFETs. Jiann-Heng Chen 陳建亨 2013 學位論文 ; thesis 89 zh-TW
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language zh-TW
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description 碩士 === 國立暨南國際大學 === 電機工程學系 === 101 === In this thesis, the SAM/SiO2 stacked sensing membrane was used to improve the sensing characteristic of ISFETs. In our results, the sensitivity, hysteresis and drift of EIS with the SAM/SiO2 stacked sensing membrane were all improved. Besides, the sensitivity of ISFETs was also improved .This technology will be suitable for the future high sensitivity ISFETs.
author2 Jiann-Heng Chen
author_facet Jiann-Heng Chen
Tzu-Nien Lee
李子念
author Tzu-Nien Lee
李子念
spellingShingle Tzu-Nien Lee
李子念
The Study of SAMs/SiO2 Stacked Sensing Membrane for ISFETs
author_sort Tzu-Nien Lee
title The Study of SAMs/SiO2 Stacked Sensing Membrane for ISFETs
title_short The Study of SAMs/SiO2 Stacked Sensing Membrane for ISFETs
title_full The Study of SAMs/SiO2 Stacked Sensing Membrane for ISFETs
title_fullStr The Study of SAMs/SiO2 Stacked Sensing Membrane for ISFETs
title_full_unstemmed The Study of SAMs/SiO2 Stacked Sensing Membrane for ISFETs
title_sort study of sams/sio2 stacked sensing membrane for isfets
publishDate 2013
url http://ndltd.ncl.edu.tw/handle/45925080917437867195
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