Development of Ohmic Contacts with Low Surface Roughness and Low Contact Resistance on AlGaN/GaN HEMTs

碩士 === 國立交通大學 === 材料科學與工程學系 === 101 === The characteristics of Ohmic contacts on GaN high electron mobility transistors (HEMTs) have profound influence to the DC and RF performance. The most critical issue for Ohmic contacts on GaN HEMTs is the roughness of the surface morphology caused by inter...

Full description

Bibliographic Details
Main Authors: Lin, Tai-Ming, 林泰名
Other Authors: Chang, Edward Yi
Format: Others
Language:en_US
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/08365759460063234980