Interface morphologies and electrical properties of bonded Ge/Si wafers

碩士 === 國立交通大學 === 材料科學與工程學系所 === 101 === Silicon and Germanium integrated for applications in optical communication systems and interconnection have attracted much attention. The formation of a heterojunction between hybrid materials by wafer bonding technique has been generally successful. During h...

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Bibliographic Details
Main Authors: Chiu, Yu-Chia, 邱郁珈
Other Authors: Wu, Yew-Chung
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/06230961287785022027