Micro-Patterned Low Temperature Ge on Si substrate for High Quality GaAs Growth

碩士 === 國立交通大學 === 照明與能源光電研究所 === 101 === Moore’s law predicts when the device is scaling down below 100 nm, the performance of Si device reaches its limitation. In the same time, the outstanding features of III-V materials higher electron mobility will play a major role along with Si in future...

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Bibliographic Details
Main Authors: Yang, Yuan-Cheng, 楊元成
Other Authors: Chang, Yi
Format: Others
Language:en_US
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/77221754298868157845