Accelerometer Design with A Low-Power Capacitor to Frequency Readout Circuit
碩士 === 國立交通大學 === 電子研究所 === 101 === A monolithic accelerometer with integrated capacitance to frequency readout in mixed signal MEMS process is proposed. It directly converts to the frequency dependent signal by the integrator, the comparator and the digital logic circuit. Compared with capacitance...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49861475790623103686 |